Pumping Speed of Cylindrical Magnetron Sputter Ion Pump for Ar, CH4, He, H2.
نویسندگان
چکیده
منابع مشابه
Real-time quantitative analysis of H2, He, O2, and Ar by quadrupole ion trap mass spectrometry.
The use of a quadrupole ion trap mass spectrometer (QITMS) for quantitative analysis of hydrogen and helium as well as of other permanent gases is demonstrated. Like commercial instruments, the customized QITMS uses mass selective instability; however, this instrument operates at a greater trapping frequency and without a buffer gas. Thus, a useable mass range from 2 to over 50 daltons (Da) is ...
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متن کاملSputter-ion Pumps
The following paper outlines the working principles of sputter-ion pumps. The pumping mechanisms for reactive and inert gas species, as well as argon instability are explained. The operating pressure range, special designs for integrated linear pumps in accelerators and operational aspects are discussed.
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ژورنال
عنوان ژورنال: SHINKU
سال: 1995
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.38.259